BEVERLY, Mass., Oct. 16, 2008 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (NasdaqGS:ACLS - News), a leading supplier of ion implantation and cleaning systems, today announced that it plans to release third quarter 2008 financial results on Tuesday, November 4, 2008.

Safe Harbor Statement

This document contains a forward-looking statement under the SEC safe harbor provisions regarding our plans to announce financial results for the third quarter of 2008. This statement is based on management's current expectations for the completion of financial reports for the period and could be impacted by future events, including some that are outside of the Company, such as the timing of the completion of work by our independent auditor and global economic, political and financial conditions. Other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: http://www.axcelis.com.

         Axcelis Technologies, Inc. 
         Maureen Hart
           (978) 787-4266
           Fax: (978) 787-4275
           maureen.hart@axcelis.com
         Investor Contact:
         Stephen Bassett
           (978) 787-4000
           Fax: (978) 787-9133
           investor.relations@axcelis.com
         
         Loomis Group
         Heather Smith
           (617) 309-8005
           Fax:(617) 638-0033
           smithh@loomisgroup.com