ITEM 1.01. ENTRY INTO A MATERIAL DEFINITIVE AGREEMENT

Amendment of Agreements with ATMI

On December 31, 2012, we amended the Wets Workflow Purchase Agreement and the Dry Workflow Purchase Agreement with ATMI dated July 13, 2007 and December 16, 2008 respectively (collectively, the "Original Agreements"). The amendment extends ATMI's license to our HPC technology and our associated support obligations through 2013.

Under this amendment, ATMI will pay us a fixed fee for the calendar year 2013 in exchange for using our HPC technology and for selling ATMI products developed using our HPC Technology. ATMI's obligation to pay volume-based royalties resumes after the term of this amendment.

Additionally, during 2013, ATMI will pay us fees (i) to provide support services for tools that ATMI purchased from us under the Original Agreements and (ii) to supply a certain number of full-time employees or contractors dedicated to supporting ATMI's use of the dry and wets workflows.

The foregoing description of the amendment does not purport to be complete and is qualified in its entirety by reference to the amendment that will subsequently be filed as an exhibit to our Annual Report on Form 10-K.

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