Item 1.01 Entry into a Material Definitive Agreement.

1 Kaki Bukit View, Singapore Lease

On August 15, 2012, Ultratech SE Asia PTE, Ltd ("Singapore SE"), an indirect wholly-owned subsidiary of Ultratech, Inc.("Ultratech" or, the "Company"), renegotiated its February 17, 2010 lease ("the Original Lease") and entered into a new lease (the "New Singapore Lease") with Ascendas Services Pte Ltd, ("Ascendas"), effective June 15, 2013. The New Singapore Lease governs the terms and conditions under which Singapore SE leases certain premises from Ascendas located at 1 Kaki Bukit View, Singapore. The New Singapore Lease extended the term of the Original Lease such that it expires on June 14, 2018 and sets forth the revised base rent for each of the years covered.

Item 9.01 Financial Statements and Exhibits.

(d) Exhibit

10.1 New Singapore Lease (1Kaki Bukit View, Singapore), entered into on August 15, 2012, by and between Ascendas, Inc. and Singapore SE.

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