Item 7.01 Regulation FD Disclosure

On May 29 and May 30, 2012, management of Axcelis Technologies, Inc. (the "Company") will be participating in a presentation and meetings with investors and analysts. The presentation is available in the "Investors" section of the Company's website at www.axcelis.com. As part of this presentation, the Company will be reiterating but not updating previously issued financial guidance for the second quarter of fiscal 2012. The second quarter guidance was originally communicated in the Company's first quarter earnings call on May 3, 2012 and was also reiterated in a press release on May 24, 2012, which is attached as Exhibit 99.1 to this Current Report on Form 8-K and incorporated by reference herein.

The information in this report shall not be deemed "filed" for any purpose, nor shall it be deemed incorporated by reference in any filing under the Securities Act of 1933, as amended, or the Securities Exchange Act of 1934, as amended, regardless of any general incorporation language in any such filing. This report will not be deemed an admission as to the materiality of any information in the report that is provided in connection with Regulation FD.

Item 9.01 Financial Statements and Exhibits.

(d) Exhibits

Exhibit No. Description

99.1 Press Release dated May 24, 2012. Filed herewith.

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