RSU Grants and Stock Option Awards for 2009

Effective November 5, 2009, the Compensation Committee of the Board of Directors ("Board") of FEI Company granted restricted stock unit ("RSU") and stock option awards from within the Company's 1995 Stock Incentive Plan to the Company's named executive officers in the amounts described in the following table. These awards were annual grants made as long term incentive compensation for the executives named.

                                        Number of         Number of
             Named Executive Officer   RSUs Granted   Options Granted 1
             Don R. Kania                28,2002           62,0003
             Raymond A. Link             13,5424           29,7925
             Benjamin Loh                10,4176           22,9177
             Robert H. J. Fastenau        9,3758           20,6259
             Bradley J. Thies            6,66710          14,66711

1 All options carry a term of seven years.

2 These RSUs vest in three equal annual installments beginning November 5, 2011 and on each vesting date Mr. Kania will receive 33 1/2% of the shares minus applicable taxes.

3 These options vest in four equal annual installments beginning November 5, 2010.

4 11,875 RSUs vest in four equal annual installments beginning November 5, 2010 and on each vesting date Mr. Link will receive 25% of the shares minus applicable taxes. 1,667 RSUs vest in three equal annual installments beginning November 5, 2011 and on each vesting date Mr. Link will receive 33 1/2% of the shares minus applicable taxes.

5 26,125 options vest in four equal annual installments beginning November 5, 2010. 3,667 options vest in three equal annual installments beginning November 5, 2011.

6 10,000 RSUs vest in four equal annual installments beginning November 5, 2010. 417 RSUs vest in three equal annual installments beginning November 5, 2011.

7 22,000 options vest in four equal annual installments beginning November 5, 2010. 917 options vest in three equal annual installments beginning November 5, 2011.

8 5,417 RSUs vest in four equal annual installments beginning November 5, 2010 and on each vesting date Mr. Fastenau will receive 25% of the shares minus applicable taxes. 3,958 RSUs vest in three equal annual installments beginning November 5, 2011 and on each vesting date Mr. Fastenau will receive 33 1/2% of the shares minus applicable taxes.

9 11,917 options vest in four equal annual installments beginning November 5, 2010. 8,708 options vest in three equal annual installments beginning November 5, 2011.

10 5,833 RSUs vest in four equal annual installments beginning November 5, 2010 and on each vesting date Mr. Thies will receive 25% of the shares minus applicable taxes. 834 RSUs vest in three equal annual installments beginning November 5, 2011 and on each vesting date Mr. Thies will receive 33 1/2% of the shares minus applicable taxes.

11 12,833 options vest in four equal annual installments beginning November 5, 2010. 1,834 options vest in three equal annual installments beginning November 5, 2011.