Item 5.02 Departure of Directors or Certain Officers; Election of Directors;
Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

On October 13, 2009, the Board of Directors of Ultratech, Inc. (the "Company") appointed Bin-ming Benjamin Tsai to its Board of Directors (the "Board"). Dr. Tsai will serve on the Board's Compensation Committee.

There are no relationships or related transactions between the Company and Dr. Tsai that would be required to be reported under Section 404(a) of Regulation S-K. In connection with his appointment to the Board, Dr. Tsai will be compensated in accordance with the Company's compensation arrangements for its non-employee Board members. The Company entered into an indemnification agreement with Dr. Tsai, the terms of which are identical in all material respects to the form of indemnification agreement that the Company has previously entered into with each of its directors and the form of which was filed with the Securities and Exchange Commission as Exhibit 10.1 to the Form 8-K filed by the Company on January 30, 2009.

On October 15, 2009, the Company issued a press release announcing Mr. Tsai's appointment to the Board. The press release is attached hereto as Exhibit 99.1 and is incorporated herein by reference.

Item 9.01 Financial Statements and Exhibits.

(d) Exhibits

99.1 Press release.

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