Item 5.02 Departure of Directors or Certain Officers; Election of Directors;
Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

On September 18, 2009, Vincent F. Sollitto, Jr. resigned as a member of Ultratech, Inc.'s Board of Directors. On September 23, 2009, Ultratech issued a press release announcing Mr. Sollitto's resignation. The press release is attached hereto as Exhibit 99.1 and incorporated herein by reference.

Item 9.01 Financial Statements and Exhibits.

(d) Exhibits

99.1 Press release.

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