(c)  Exhibits:

     Exhibit No.    Description

     Exhibit 10.13  Change in Control Severance Agreement, dated August 10,
                    2009, between Semitool, Inc. and Larry Viano
     Exhibit 10.14  Change in Control Severance Agreement, dated August 10,
                    2009, between Semitool, Inc. and Larry Murphy
     Exhibit 10.15  Change in Control Severance Agreement, dated August 10,
                    2009, between Semitool, Inc. and Timothy C. Dodkin
     Exhibit 10.16  Change in Control Severance Agreement, dated August 10,
                    2009, between Semitool, Inc. and Herbert Oetzlinger
     Exhibit 10.17  Form of Change in Control Severance Agreement