Item 5.02 Departure of Directors or Certain Officers; Election of Directors;
Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

On June 4, 2009, management of Electro Scientific Industries, Inc., ("ESI") announced that it will extend its temporary pay reduction program currently in effect for its executive management, through September 30, 2009. The current pay reduction program was previously scheduled to expire on June 30, 2009. During this pay reduction period, ESI's President and Chief Executive Officer's salary will be reduced 15% and the Vice Presidents' salaries each will be reduced 12%.

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