Item 5.02 Departure of Directors or Principal Officers; Election of Directors;
Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

(e) On April 8, 2009, the Compensation and Options Committee of the Board of Directors of Amtech Systems, Inc. (the "Company") and the Board of Directors approved a reduction of the base salary paid to the Company's executive officers as proposed by the Company's executive officers.

The Board approved a salary decrease for Jong S. Whang, the Company's Chairman of the Board, Chief Executive Officer and President, from $350,000 to $315,000, a salary decrease for Bradley C. Anderson, the Company's Vice President-Finance and Chief Financial Officer, from $245,000 to $220,500, and a salary decrease for Robert T. Hass, the Company's Chief Accounting Officer, from $148,000 to $133,200.

Each of the salary decreases are effective as of April 1, 2009.

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