Item 2.05. Costs Associated with Exit or Disposal Activities.

On March 12, 2009 we committed to a reduction in our worldwide workforce of approximately 16 percent, or a total of approximately 130 employees, in response to continuing deterioration in the lithography sector of the semiconductor capital equipment market. As a result of this reduction in workforce, we expect to incur cash charges of approximately $3.7 million primarily for severance in the three months ending March 31, 2009.

Forward Looking Statements

Statements in this report that are not strictly historical in nature are forward-looking statements. These statements include statements regarding the expected costs of the reduction in workforce. These statements are predictions based on current information and expectations that involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in any of such statements due to various factors, including but not limited to our ability to achieve forecasted headcount reductions associated with the reduction in workforce. For a discussion of these and other factors which may cause actual events or our results to differ from those projected, please refer to our most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission. You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this report. All forward-looking statements are qualified in their entirety by this cautionary statement, and we undertake no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this report.