Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

(e) On March 10, 2008, the Compensation Committee of the Board of Directors of MKS Instruments, Inc. (the "Company") approved the 2008 compensatory arrangements for the Company's executive officers, including base salary levels and the Company's 2008 Management Incentive Bonus Plan.

The Summary of 2008 Compensatory Arrangements with Executive Officers is attached as Exhibit 99.1 to this Current Report on Form 8-K. A Summary of the 2008 Management Incentive Bonus Plan is attached as Exhibit 99.2 to this Current Report on Form 8-K. The full text of the 2008 Management Incentive Bonus Plan will be filed as an exhibit to the Company's Quarterly Report on Form 10-Q for the quarter ending March 31, 2008.

Item 9.01 Financial Statements and Exhibits.

(d) Exhibits.

99.1 Summary of 2008 Compensatory Arrangements with Executive Officers

99.2 Summary of 2008 Management Incentive Bonus Plan

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